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Growth and Crystallization of SiO(2)/GeO(2) Thin Films on Si(100) Substrates

The growth of [Formula: see text]-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO [Formula: see text] /GeO [Formula: see text] thin films by pulsed laser deposition and...

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Detalhes bibliográficos
Publicado no:Nanomaterials (Basel)
Main Authors: Antoja-Lleonart, Jordi, Ocelík, Václav, Zhou, Silang, de Hond, Kit, Koster, Gertjan, Rijnders, Guus, Noheda, Beatriz
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8305750/
https://ncbi.nlm.nih.gov/pubmed/34201843
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11071654
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