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A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has ext...

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Detalles Bibliográficos
Publicado en:Beilstein J Nanotechnol
Autor Principal: Allen, Frances I
Formato: Artigo
Idioma:Inglês
Publicado: Beilstein-Institut 2021
Assuntos:
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC8261528/
https://ncbi.nlm.nih.gov/pubmed/34285866
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.12.52
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