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Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM
It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon...
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| Publicado no: | Materials (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8199708/ https://ncbi.nlm.nih.gov/pubmed/34199625 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14113034 |
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