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Hardness and Stress of Amorphous Carbon Films Deposited by Glow Discharge and Ion Beam Assisting Deposition

The hardness and stress of amorphous carbon films prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon films were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposit...

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Foilsithe in:Brazilian Journal of Physics
Main Authors: F. C. Marques, R. G. Lacerda
Formáid: Artigo
Teanga:Inglês
Foilsithe: Sociedade Brasileira de Física 2000
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Rochtain Ar Líne:https://www.redalyc.org/articulo.oa?id=46413500008
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