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Hardness and Stress of Amorphous Carbon Films Deposited by Glow Discharge and Ion Beam Assisting Deposition
The hardness and stress of amorphous carbon films prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon films were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposit...
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| Gepubliceerd in: | Brazilian Journal of Physics |
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| Hoofdauteurs: | , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Sociedade Brasileira de Física
2000
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| Onderwerpen: | |
| Online toegang: | https://www.redalyc.org/articulo.oa?id=46413500008 |
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