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Hardness and Stress of Amorphous Carbon Films Deposited by Glow Discharge and Ion Beam Assisting Deposition

The hardness and stress of amorphous carbon films prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon films were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposit...

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Bibliografische gegevens
Gepubliceerd in:Brazilian Journal of Physics
Hoofdauteurs: F. C. Marques, R. G. Lacerda
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Sociedade Brasileira de Física 2000
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Online toegang:https://www.redalyc.org/articulo.oa?id=46413500008
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