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Experiment and simulation of single inhibitor SH110 for void-free TSV copper filling

Three-dimensional integration with through-silicon vias (TSVs) is a promising microelectronic interconnection technology. Three-component additives are commonly used for void-free TSV filling. However, optimising the additive concentrations is an expensive process. To avoid this, a single-component...

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Bibliografiske detaljer
Udgivet i:Sci Rep
Main Authors: Wang, Fuliang, Le, Yuping
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group UK 2021
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8187486/
https://ncbi.nlm.nih.gov/pubmed/34103562
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-021-91318-9
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