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Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2021
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7867341/ https://ncbi.nlm.nih.gov/pubmed/33540796 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21031014 |
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