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Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection

Si surfaces were texturized with periodically arrayed oblique nanopillars using slanted plasma etching, and their optical reflectance was measured. The weighted mean reflectance (R(w)) of the nanopillar-arrayed Si substrate decreased monotonically with increasing angles of the nanopillars. This may...

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Publicado en:Materials (Basel)
Main Authors: Kim, Jun-Hyun, You, Sanghyun, Kim, Chang-Koo
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2021
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC7830988/
https://ncbi.nlm.nih.gov/pubmed/33466751
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14020380
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