Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflec...

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Bibliografiske detaljer
Main Authors: Lin, Yi-Ruei, Wang, Hsin-Ping, Lin, Chin-An, He, Jr-Hau
Format: Artigo
Sprog:Inglês
Udgivet: American Institute of Physics 2009
Fag:
Nanoscale Science and Design
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC2802557/
https://ncbi.nlm.nih.gov/pubmed/20057938
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3267147
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