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Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings
We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflec...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2802557/ https://ncbi.nlm.nih.gov/pubmed/20057938 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3267147 |
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