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Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection
Si surfaces were texturized with periodically arrayed oblique nanopillars using slanted plasma etching, and their optical reflectance was measured. The weighted mean reflectance (R(w)) of the nanopillar-arrayed Si substrate decreased monotonically with increasing angles of the nanopillars. This may...
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| Publicado no: | Materials (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7830988/ https://ncbi.nlm.nih.gov/pubmed/33466751 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14020380 |
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