A carregar...
Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology
Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs Yb: KGW lase...
Na minha lista:
| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7825030/ https://ncbi.nlm.nih.gov/pubmed/33418919 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010056 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|