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Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5)...
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| Udgivet i: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group
2015
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4308694/ https://ncbi.nlm.nih.gov/pubmed/25627294 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep08072 |
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