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Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mas...

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Bibliografische gegevens
Gepubliceerd in:Micromachines (Basel)
Hoofdauteurs: Nathani, Muhammad Umair, Nazemi, Haleh, Love, Calvin, Babu Lopez, Yameema, Swaminathan, Siddharth, Emadi, Arezoo
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2020
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7823894/
https://ncbi.nlm.nih.gov/pubmed/33375651
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010013
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