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Capacitive Based Micromachined Resonators for Low Level Mass Detection
Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mas...
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| Vydáno v: | Micromachines (Basel) |
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| Hlavní autoři: | , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2020
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7823894/ https://ncbi.nlm.nih.gov/pubmed/33375651 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010013 |
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