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Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked b...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7806672/ https://ncbi.nlm.nih.gov/pubmed/33441961 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-80880-3 |
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