Van Toan, N., Tuoi, T. T. K., Inomata, N., Toda, M., & Ono, T. (2021). Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices. Sci Rep.
Παραπομπή Chicago StyleVan Toan, Nguyen, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, και Takahito Ono. "Aluminum Doped Zinc Oxide Deposited By Atomic Layer Deposition and Its Applications to Micro/nano Devices." Sci Rep 2021.
Παραπομπή MLAVan Toan, Nguyen, et al. "Aluminum Doped Zinc Oxide Deposited By Atomic Layer Deposition and Its Applications to Micro/nano Devices." Sci Rep 2021.
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