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Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Nanomaterials (Basel)
Hauptverfasser: Ma, Zichao, Zhou, Shaolin, Zhou, Changjian, Xiao, Ying, Li, Suwen, Chan, Mansun
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2020
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7600545/
https://ncbi.nlm.nih.gov/pubmed/32992981
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10101918
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