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Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts
Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...
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| Pubblicato in: | Nanomaterials (Basel) |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2020
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7600545/ https://ncbi.nlm.nih.gov/pubmed/32992981 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10101918 |
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