Yüklüyor......
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
We demonstrate a method for the low temperature growth (350 °C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive thin-films. Due to the low growth temperature, the process allows integration with modern low-κ dielectrics and some flexible substrates. The process is com...
Kaydedildi:
| Yayımlandı: | J Vis Exp |
|---|---|
| Asıl Yazarlar: | , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MyJove Corporation
2015
|
| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4692772/ https://ncbi.nlm.nih.gov/pubmed/26709530 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53260 |
| Etiketler: |
Etiketle
Etiket eklenmemiş, İlk siz ekleyin!
|