A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors

Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a...

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Bibliographic Details
Published in:Micromachines (Basel)
Main Authors: Lee, Ah-Hyoung, Lee, Jihun, Laiwalla, Farah, Leung, Vincent, Huang, Jiannan, Nurmikko, Arto, Song, Yoon-Kyu
Format: Artigo
Language:Inglês
Published: MDPI 2020
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC7600457/
https://ncbi.nlm.nih.gov/pubmed/33028005
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11100925
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