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A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2020
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7600457/ https://ncbi.nlm.nih.gov/pubmed/33028005 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11100925 |
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