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Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
Transition‐metal phosphides (TMP) prepared by atomic layer deposition (ALD) are reported for the first time. Ultrathin Co‐P films were deposited by using PH(3) plasma as the phosphorus source and an extra H(2) plasma step to remove excess P in the growing films. The optimized ALD process proceeded b...
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| Publicado no: | Angew Chem Int Ed Engl |
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| Main Authors: | , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
John Wiley and Sons Inc.
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7540345/ https://ncbi.nlm.nih.gov/pubmed/32608102 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/anie.202002280 |
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