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Measurement of In-Plane Motions in MEMS
We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated c...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7349389/ https://ncbi.nlm.nih.gov/pubmed/32630484 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20123594 |
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