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Evolution of lattice distortions in 4H-SiC wafers with varying doping
Lattice distortions (LD) in 4H-silicon carbide (SiC) wafers were quantified using synchrotron X-ray rocking curve mapping (RCM), and were resolved into their two components of lattice strain (Δd/d) and lattice plane curvature (LPC) for 150 mm diameter wafers. The evolution of these LDs were investig...
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| Publicado en: | Sci Rep |
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| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Publishing Group UK
2020
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7331604/ https://ncbi.nlm.nih.gov/pubmed/32616856 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-67900-y |
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