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Evolution of lattice distortions in 4H-SiC wafers with varying doping

Lattice distortions (LD) in 4H-silicon carbide (SiC) wafers were quantified using synchrotron X-ray rocking curve mapping (RCM), and were resolved into their two components of lattice strain (Δd/d) and lattice plane curvature (LPC) for 150 mm diameter wafers. The evolution of these LDs were investig...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Mahadik, Nadeemullah A., Das, Hrishikesh, Stoupin, Stanislav, Stahlbush, Robert E., Bonanno, Peter L., Xu, Xueping, Rengarajan, Varatharajan, Ruland, Gary E.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7331604/
https://ncbi.nlm.nih.gov/pubmed/32616856
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-67900-y
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