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Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A pr...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2020
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7309065/ https://ncbi.nlm.nih.gov/pubmed/32498465 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20113162 |
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