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Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors
A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode a...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2020
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7349374/ https://ncbi.nlm.nih.gov/pubmed/32575658 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20123483 |
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