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Silicon Conical Structures by Metal Assisted Chemical Etching
A simple and inexpensive method to obtain Si conical structures is proposed. The method consists of a sequence of steps that include photolithography and metal assisted chemical etching (MACE) to create porous regions that are dissolved in a post-etching process. The proposed process takes advantage...
Gardado en:
| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2020
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7231320/ https://ncbi.nlm.nih.gov/pubmed/32290505 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11040402 |
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