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Structural and Optical Properties of Silicon Nanowire Arrays Fabricated by Metal Assisted Chemical Etching With Ammonium Fluoride

Here we report on the metal assisted chemical etching method of silicon nanowires (SiNWs) manufacturing, where the commonly used hydrofluoric acid (HF) has been successfully replaced with ammonium fluoride (NH(4)F). The mechanism of the etching process and the effect of the pH values of H(2)O(2): NH...

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書目詳細資料
發表在:Front Chem
Main Authors: Gonchar, Kirill A., Kitaeva, Veronika Y., Zharik, George A., Eliseev, Andrei A., Osminkina, Liubov A.
格式: Artigo
語言:Inglês
出版: Frontiers Media S.A. 2019
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在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC6328714/
https://ncbi.nlm.nih.gov/pubmed/30662894
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3389/fchem.2018.00653
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