Caricamento...
Silicon Conical Structures by Metal Assisted Chemical Etching
A simple and inexpensive method to obtain Si conical structures is proposed. The method consists of a sequence of steps that include photolithography and metal assisted chemical etching (MACE) to create porous regions that are dissolved in a post-etching process. The proposed process takes advantage...
Salvato in:
| Pubblicato in: | Micromachines (Basel) |
|---|---|
| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2020
|
| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7231320/ https://ncbi.nlm.nih.gov/pubmed/32290505 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11040402 |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|