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A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer
This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on [Formula: see text]-phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was develop...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7085767/ https://ncbi.nlm.nih.gov/pubmed/32121461 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20051346 |
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