A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer

This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on [Formula: see text]-phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was develop...

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Vydáno v:Sensors (Basel)
Hlavní autoři: Wu, Ting, Jin, Hao, Dong, Shurong, Xuan, Weipeng, Xu, Hongsheng, Lu, Leihe, Fang, Zijing, Huang, Shuyi, Tao, Xiang, Shi, Lin, Liu, Shuting, Luo, Jikui
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2020
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7085767/
https://ncbi.nlm.nih.gov/pubmed/32121461
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20051346
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