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Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components....
Tallennettuna:
| Julkaisussa: | Sci Rep |
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| Päätekijät: | , , , , , , , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
Nature Publishing Group
2015
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| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4379503/ https://ncbi.nlm.nih.gov/pubmed/25824706 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep09510 |
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