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Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing
We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7074961/ https://ncbi.nlm.nih.gov/pubmed/31972982 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020113 |
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