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Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing

We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of...

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Bibliografiska uppgifter
I publikationen:Micromachines (Basel)
Huvudupphovsmän: Fornell, Anna, Söderbäck, Per, Liu, Zhenhua, De Albuquerque Moreira, Milena, Tenje, Maria
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2020
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC7074961/
https://ncbi.nlm.nih.gov/pubmed/31972982
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020113
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