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Development and Fabrication of Nanoporous Silicon-based Bioreactors within a Microfluidic Chip
Multi-scale lithography and cryogenic deep reactive ion etching techniques were used to create ensembles of nanoporous, picoliter volume, reaction vessels within a microfluidic system. The fabrication of these vessels is described and how this process can be used to tailor vessel porosity by control...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3076636/ https://ncbi.nlm.nih.gov/pubmed/20390137 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/b921592a |
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