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Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been limited due to the...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7074599/ https://ncbi.nlm.nih.gov/pubmed/32046054 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020171 |
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