A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF)-based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular-d...

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Bibliografski detalji
Izdano u:J Synchrotron Radiat
Glavni autori: Nikolaev, K. V., Soltwisch, V., Hönicke, P., Scholze, F., de la Rie, J., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., Bijkerk, F.
Format: Artigo
Jezik:Inglês
Izdano: International Union of Crystallography 2020
Teme:
Research Papers
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7064098/
https://ncbi.nlm.nih.gov/pubmed/32153277
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S1600577519016345
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