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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s...

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Detalhes bibliográficos
Publicado no:IUCrJ
Main Authors: Pflüger, Mika, Soltwisch, Victor, Probst, Jürgen, Scholze, Frank, Krumrey, Michael
Formato: Artigo
Idioma:Inglês
Publicado em: International Union of Crystallography 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://ncbi.nlm.nih.gov/pubmed/28875030
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S2052252517006297
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