Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s...

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Bibliografische gegevens
Gepubliceerd in:IUCrJ
Hoofdauteurs: Pflüger, Mika, Soltwisch, Victor, Probst, Jürgen, Scholze, Frank, Krumrey, Michael
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: International Union of Crystallography 2017
Onderwerpen:
Research Papers
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://ncbi.nlm.nih.gov/pubmed/28875030
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S2052252517006297
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