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SiGe nanocrystals in SiO(2) with high photosensitivity from visible to short-wave infrared
Films of SiGe nanocrystals (NCs) in oxide have the advantage of tuning the energy band gap by adjusting SiGe NCs composition and size. In this study, SiGe-SiO(2) amorphous films were deposited by magnetron sputtering on Si substrate followed by rapid thermal annealing at 700, 800 and 1000 °C. We inv...
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| Publicado no: | Sci Rep |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7040041/ https://ncbi.nlm.nih.gov/pubmed/32094361 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-60000-x |
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