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Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morph...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Plank, Harald, Winkler, Robert, Schwalb, Christian H., Hütner, Johanna, Fowlkes, Jason D., Rack, Philip D., Utke, Ivo, Huth, Michael
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2019
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7019982/
https://ncbi.nlm.nih.gov/pubmed/31906005
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010048
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