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Temperature-Dependent Growth Characteristics of Nb- and CoFe-Based Nanostructures by Direct-Write Using Focused Electron Beam-Induced Deposition

Focused electron and ion beam-induced deposition (FEBID/FIBID) are direct-write techniques with particular advantages in three-dimensional (3D) fabrication of ferromagnetic or superconducting nanostructures. Recently, two novel precursors, HCo [Formula: see text] Fe(CO) [Formula: see text] and Nb(NM...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Huth, Michael, Porrati, Fabrizio, Gruszka, Peter, Barth, Sven
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
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Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7019710/
https://ncbi.nlm.nih.gov/pubmed/31881650
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010028
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