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In situ growth optimization in focused electron-beam induced deposition
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3869208/ https://ncbi.nlm.nih.gov/pubmed/24367761 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.4.103 |
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