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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the e...
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| Publicado no: | Beilstein J Nanotechnol |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6176821/ https://ncbi.nlm.nih.gov/pubmed/30345218 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.240 |
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