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Modelling focused electron beam induced deposition beyond Langmuir adsorption
In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion...
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| Pubblicato in: | Beilstein J Nanotechnol |
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| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Beilstein-Institut
2017
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5647696/ https://ncbi.nlm.nih.gov/pubmed/29090116 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.8.214 |
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