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Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy
Optical scatterfield imaging microscopy technique which has the capability of controlling scattered fields in the imaging mode is useful for quantitative nanoscale dimensional metrology that yields precise characterization of nanoscale features for semiconductor device manufacturing process control....
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| Publicado no: | Opt Express |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6998213/ https://ncbi.nlm.nih.gov/pubmed/31684249 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.27.029938 |
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