Bae, Y. S., Sohn, M. Y., Lee, D., & Choi, S. (2019). Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy. Opt Express.
Citação norma ChicagoBae, Yoon Sung, Martin Y. Sohn, Dong-Ryoung Lee, and Sang-Soo Choi. "Effect of Partial Coherence On Dimensional Measurement Sensitivity for DUV Scatterfield Imaging Microscopy." Opt Express 2019.
Citação norma MLABae, Yoon Sung, Martin Y. Sohn, Dong-Ryoung Lee, and Sang-Soo Choi. "Effect of Partial Coherence On Dimensional Measurement Sensitivity for DUV Scatterfield Imaging Microscopy." Opt Express 2019.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.