Loading...
Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy
Accurate optics-based dimensional measurements of features sized well-below the diffraction limit require a thorough understanding of the illumination within the optical column and of the three-dimensional scattered fields that contain the information required for quantitative metrology. Scatterfiel...
Na minha lista:
| Udgivet i: | Optik (Stuttg) |
|---|---|
| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2017
|
| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5831148/ https://ncbi.nlm.nih.gov/pubmed/29503467 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ijleo.2017.11.206 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|