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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy
Accurate optics-based dimensional measurements of features sized well-below the diffraction limit require a thorough understanding of the illumination within the optical column and of the three-dimensional scattered fields that contain the information required for quantitative metrology. Scatterfiel...
Tallennettuna:
| Julkaisussa: | Optik (Stuttg) |
|---|---|
| Päätekijät: | , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
2017
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| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5831148/ https://ncbi.nlm.nih.gov/pubmed/29503467 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ijleo.2017.11.206 |
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