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A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers
This paper presents the development and measurement results of a complementary metal oxide semiconductor (CMOS) readout application-specific integrated circuit (ASIC) for bulk-silicon microelectromechanical system (MEMS) accelerometers. The proposed ASIC converts the capacitance difference of the ME...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6982914/ https://ncbi.nlm.nih.gov/pubmed/31906194 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20010241 |
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