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Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme

A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The experiments show noise floor is 421.70 μg/√Hz. The...

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Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Micromachines (Basel)
Prif Awduron: Liu, Yu-Sian, Wen, Kuei-Ann
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI 2018
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC6315608/
https://ncbi.nlm.nih.gov/pubmed/30513614
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9120637
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