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Impact of Line Edge Roughness on ReRAM Uniformity and Scaling

We investigate the effects of Line Edge Roughness (LER) of electrode lines on the uniformity of Resistive Random Access Memory (ReRAM) device areas in cross-point architectures. To this end, a modeling approach is implemented based on the generation of 2D cross-point patterns with predefined and con...

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Bibliografske podrobnosti
izdano v:Materials (Basel)
Main Authors: Constantoudis, Vassilios, Papavieros, George, Karakolis, Panagiotis, Khiat, Ali, Prodromakis, Themistoklis, Dimitrakis, Panagiotis
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2019
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC6926851/
https://ncbi.nlm.nih.gov/pubmed/31801205
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12233972
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